Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive...
Reexamination Certificate
2006-10-10
2009-11-24
Chea, Thorl (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
C430S005000, C430S322000
Reexamination Certificate
active
07622239
ABSTRACT:
A method for making a patterned SiO2films over TiO2(Si02/Ti02) under ambient atmospheric conditions, including room temperature, through photo and chemical reactions. The method is simple, convenient and can be performed in a short period of time, typically less than two hours. The patterned TiO2film is fabricated through photo-irradiation of a photosensitive organic-titanium film using a mask. Silica particles are generated from silicate solution by adjusting pH values to 10 to 8 with hydrochloric acid. The pre-deposited TiO2film has a strong attraction for the SiO2particles, leading to the instant formation of SiO2film over the TiO2film. The silica films are also amino-silylated with 3-aminopropyltriethoxysilane toward applications such as patternable, location-specific silica-based separation and purification.
REFERENCES:
patent: 6796143 (2004-09-01), Clasen et al.
Bermudez, V.Z., Carlos, L.D., Alcacer, L., 1999. Chem. Mater. 11, 569.
Prado, A.G.S., Miranda, B.S., Dias, J.A., 2004,. Colloids and Surface A: Physiochem. Eng. Aspects, 242, 137.
Saito, K., Uchiyama, Y., and Abe, K., 2003. Mater. Sci. Semicond. Process, 6, 363.
Takeda, Y., Kishimoto, N., 2003. Nucl. Meth. B, 206, 620.
Nishizawa, J., Kurabayashi, T., Kanamoto, K., Yoshida, T., and Oizumi, T., 2003. Mater. Sci. Semicond. Process, 6, 363.
He., L.N. and Xu, J., 2003. Vacuum, 68, 197.
Tohge, N., Zhao, G., Chiba, F., 1999. Thin Solid Films, 351, 85.
Dove, P.M. and Rimstidt, J.D., 1994. In: Heaney, P.J., Prewitt, C.T. and Gibbs, G.V. (Eds.), Silica—Physical Behavior, Geochemistry and Materials Applications. Reviews in Mineralogy, 29. Mineralogic Society of America. 259.
Jiang, X., Wang, T., and Wang, Y., 2004. Colloids and Surfaces A: Physiochem. Eng. Aspects, 234, 9.
Iler, R.K , 1979. In: The Chemistry of Silica, solubility, Polymerization, Colloid and Surface Properties, and biochemistry. John Wiley & Sons.
Ding Xiaoling
Fries David P.
Chea Thorl
Hopen Anton J.
Smith & Hopen , P.A.
University of South Florida
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