Micro-oscillation element

Details Micro-oscillation element Micro-oscillation element

2006-05-02

2006-05-02

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

07038830

ABSTRACT:
A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.

REFERENCES:
patent: 6287885 (2001-09-01), Muto et al.
patent: 6449406 (2002-09-01), Fan et al.
patent: 6671078 (2003-12-01), Flanders et al.
patent: 10-190007 (1998-07-01), None
patent: 10-270714 (1998-10-01), None
patent: 2000-31502 (2000-01-01), None

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