Micro-mist generation method and apparatus

Details Micro-mist generation method and apparatus Micro-mist generation method and apparatus

2006-11-07

2006-11-07

Keasel, Eric (Department: 3752)

Fluid sprinkling, spraying, and diffusing

Including supply holder for material

Fluid pressure discharge means

C239S346000, C239S350000, C239S370000, C239S373000

Reexamination Certificate

active

07131603

ABSTRACT:
A liquid (10) stored in a generation chamber (2) is sprayed by an injection nozzle (33) using pressurized gas introduced to it. This strikes a buffer valve (4) where it is atomized. The generated mist is held in the generation chamber (2). The atomized generated mist is introduced into a particle classifier (5) and made to collide with a collision plate (52). The particles of less than 10 μm size bouncing off the collision plate are discharged as a micro-mist from a discharge port (56) and fed to a target workpiece. The large particles deposited on the collision plate are recovered in a generator.

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