Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2007-04-03
2007-04-03
Mack, Ricky (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S292000
Reexamination Certificate
active
11108259
ABSTRACT:
According to one embodiment of the present invention a micro-mirror element comprises a lower layer, a first middle layer, a second middle layer, and a micro-mirror. The lower layer includes an address portion for receiving an address voltage and a bias portion for receiving a bias voltage respectively. The first middle layer is electrically coupled to the bias portion of the lower layer. The second middle layer is electrically coupled to the first middle layer. The micro-mirror is coupled to the second middle layer and comprises a reflective surface operable to selectively tilt, in response to an application of a bias voltage and an address voltage to the lower layer, to reflect a beam of light.
REFERENCES:
patent: 6618186 (2003-09-01), Kaeriyama
patent: 2003/0142382 (2003-07-01), DiCarlo
Gong Cuiling
Mezenner Rabah
Brady III W. James
Mack Ricky
Stephens Dawn V.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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