Fishing – trapping – and vermin destroying
Patent
1995-06-06
1998-06-16
Bowers, Jr., Charles L.
Fishing, trapping, and vermin destroying
437 52, 437233, 437919, 437977, 148DIG105, H01L 218242
Patent
active
057669686
ABSTRACT:
A method of forming recesses in a substrate such as a capacitor so as to increase the surface area thereof and therefore the charge storage capacity of the capacitor. This is accomplished by utilizing a micro mask formed by agglomeration on the surface of the substrate. The agglomerated material, such as gold, titanium nitride or titanium silicide, is used as a mask for selectively etching the substrate to form recesses therein. Alternatively, an oxide transfer mask can be utilized with the agglomerated material micro mask to etch the substrate.
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Armacost Michael
Baker, Jr. A. Richard
Berry Wayne Stuart
Carl Daniel Arthur
Kenney Donald McAllpine
Bowers Jr. Charles L.
International Business Machines - Corporation
Thomas Toniae M.
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