Micro-machining dust removing device, micro-machining...

Details Micro-machining dust removing device, micro-machining... Micro-machining dust removing device, micro-machining...

2007-06-04

2011-11-22

Neckel, Alexa D. (Department: 1723)

Chemistry: electrical and wave energy

Apparatus

Electrophoretic or electro-osmotic apparatus

C205S686000

Reexamination Certificate

active

08062494

ABSTRACT:
There is a micro-machining apparatus for removing the micro-machining dust generated at the time of machining while a workpiece M is machined within a liquid W using a probe tip. The apparatus includes a stage on which the workpiece is to be placed; a probe having the probe tip, a machining device having a moving means that moves the stage and the probe relative to each other to machine the workpiece by the probe tip, and a micro-machining dust removing device having a first electrode and a second electrode that are arranged in the liquid so as to sandwich the probe tip therebetween, and a voltage application means that applies a voltage to between both the electrodes to move the micro-machining dust in the liquid.

REFERENCES:
patent: 7867374 (2011-01-01), Zdeblick et al.
patent: 2004-318091 (2004-11-01), None
patent: 2005-266650 (2005-09-01), None

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