Micro-lens array substrate and production method therefor,...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article

Reexamination Certificate

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C216S026000

Reexamination Certificate

active

07338754

ABSTRACT:
In a micro-lens array substrate (12) that includes first and second micro-lens arrays (6, 7) respectively having a plurality of lenses, the first micro-lens array (6) is sandwiched between two inorganic dielectric substrates (21, 24), and the second micro-lens array (7) is formed on one of the two inorganic dielectric substrates (21, 24).

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patent: 2001-341210 (2001-12-01), None
Fujita et al., “Fabrication method of double micro lens array substrate,” Japan Society of Applied Physics.
Okada et al., “31a-W-11 Fabrication of double micro lens arrays using a self-alignment exposure method,” Japan Society for Precision Engineering.
Kitamura et al., “Fabrication Method of Double Micro Lens Array Using Self-Alignment Technology,” 9th Microoptics Conference (MOC '03) Tokyo, Oct. 29-31, 2003, pp. 114-117.
Kitamura et al., “Fabrication Method of Double-Microlens Array Using Self-Alignment Technology,” Japanese Journal of Applied Physics, vol. 43, No. 8B, 2004.

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