Micro-enviroment load lock

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

414331, 414411, 414416, 414437, 414439, 414940, B65B 2102

Patent

active

053910354

ABSTRACT:
A micro-environment load lock for coupling a SMIF-type box containing a stack of semiconductor wafers directly to a wafer processing chamber includes a load lock chamber in communication with at least one wafer processing tool. The load lock also includes a seal operable to accept and sealably couple a SMIF-type box to the load lock chamber such that SMIF-type box becomes an extension of the load lock chamber, and provides a base that is selectably operable to open and close the SMIF-type box and to selectably draw a cassette of wafers from the SMIF-type box through a port in communication with the load lock chamber and into the load lock chamber. The base is also operable to seal the port in the absence of a SMIF-type box. A single robot is provided in conjunction with the load lock chamber for moving one wafer at a time between the cassette of wafers and the process chamber.

REFERENCES:
patent: 4532970 (1985-08-01), Tullis et al.
patent: 4534389 (1985-08-01), Tullis
patent: 4582219 (1986-04-01), Mortensen et al.
patent: 4632624 (1986-12-01), Mirkovich et al.
patent: 4668478 (1987-05-01), Homer et al.
patent: 4705444 (1987-11-01), Tullis et al.
patent: 4709834 (1987-12-01), Mortensen et al.
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4826360 (1989-05-01), Iwasawa et al.
patent: 4990047 (1991-02-01), Wagner et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5044871 (1991-09-01), Davis et al.
patent: 5058526 (1991-10-01), Matsushita et al.
patent: 5092728 (1992-03-01), Crabb et al.
patent: 5112277 (1992-05-01), Cruz et al.
patent: 5169272 (1992-12-01), Bonora et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Micro-enviroment load lock does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Micro-enviroment load lock, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Micro-enviroment load lock will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1926298

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.