Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1994-04-18
1995-02-21
Gastineau, Cheryl L.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414331, 414411, 414416, 414437, 414439, 414940, B65B 2102
Patent
active
053910354
ABSTRACT:
A micro-environment load lock for coupling a SMIF-type box containing a stack of semiconductor wafers directly to a wafer processing chamber includes a load lock chamber in communication with at least one wafer processing tool. The load lock also includes a seal operable to accept and sealably couple a SMIF-type box to the load lock chamber such that SMIF-type box becomes an extension of the load lock chamber, and provides a base that is selectably operable to open and close the SMIF-type box and to selectably draw a cassette of wafers from the SMIF-type box through a port in communication with the load lock chamber and into the load lock chamber. The base is also operable to seal the port in the absence of a SMIF-type box. A single robot is provided in conjunction with the load lock chamber for moving one wafer at a time between the cassette of wafers and the process chamber.
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Applied Materials Inc.
Gastineau Cheryl L.
Glenn Michael A.
Sgarbossa Peter J.
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