Micro-electromechanical system Fabry-Perot filter mirrors

Optics: measuring and testing – By light interference – Spectroscopy

Reexamination Certificate

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C356S519000

Reexamination Certificate

active

07573578

ABSTRACT:
According to one embodiment, a micro-electrical mechanical system apparatus includes first and second mirrors that define a cavity. Moreover, a photonic band-gap structure coats a surface of at least one of the first or second mirrors to improve reflectivity. Another embodiment includes a third mirror, wherein the second and third mirrors form a second cavity. The spaces between the mirrors might comprise, for example, a pair of Fabry-Perot filter cavities for a spectrometer.

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