Micro-electromechanical sensor

Details Micro-electromechanical sensor Micro-electromechanical sensor

2007-12-11

2007-12-11

Cygan, Michael (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

Reexamination Certificate

active

11329765

ABSTRACT:
A force or pressure transducer is includes a substrate, a dielectric material disposed on the substrate, a spacing member disposed on the dielectric material, and a resilient element disposed on both the dielectric material and the spacing member. A portion of the resilient element is separated from the dielectric material, and another portion of the resilient element is in contact with the dielectric material. The contact area between the resilient element and the dielectric material varies in response to movement of the resilient element. Changes in the contact area alter the capacitance of the transducer, which can be measured through associated circuitry.

REFERENCES:
patent: 4178621 (1979-12-01), Simonelic et al.
patent: 4345299 (1982-08-01), Ho
patent: 4358814 (1982-11-01), Lee et al.
patent: 4578735 (1986-03-01), Knecht et al.
patent: 4599888 (1986-07-01), Hufton et al.
patent: 4701826 (1987-10-01), Mikkor
patent: 4948174 (1990-08-01), Thomson et al.
patent: 4996627 (1991-02-01), Zias et al.
patent: 5121945 (1992-06-01), Thomson et al.
patent: 5274567 (1993-12-01), Kallin et al.
patent: 5357806 (1994-10-01), Dennis et al.
patent: 5369544 (1994-11-01), Mastrangelo
patent: 5528452 (1996-06-01), Ko
patent: 5531128 (1996-07-01), Ryhänen
patent: 5585311 (1996-12-01), Ko
patent: 5756899 (1998-05-01), Ugai et al.
patent: 5757608 (1998-05-01), Bernot et al.
patent: 5936164 (1999-08-01), Sparks et al.
patent: 6006607 (1999-12-01), Bryzek et al.
patent: 6109113 (2000-08-01), Chavan et al.
patent: 6122973 (2000-09-01), Nomura et al.
patent: 6151967 (2000-11-01), McIntosh et al.
patent: 6211558 (2001-04-01), Ismail et al.
patent: 6252759 (2001-06-01), Lange et al.
patent: 6257068 (2001-07-01), Briefer et al.
patent: 6267009 (2001-07-01), Drewes et al.
patent: 6355534 (2002-03-01), Cheng et al.
patent: 6465271 (2002-10-01), Ko et al.
patent: 6496348 (2002-12-01), McIntosh
patent: 6556417 (2003-04-01), McIntosh et al.
patent: 6633172 (2003-10-01), Doemens et al.
patent: 6860154 (2005-03-01), Yamamoto et al.
patent: 7047814 (2006-05-01), Zias et al.
patent: 2001/0008478 (2001-07-01), McIntosh et al.
patent: 2003/0019299 (2003-01-01), Horie et al.

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