Micro-electro-mechanical-system device with particles...

Details Micro-electro-mechanical-system device with particles... Micro-electro-mechanical-system device with particles...

2011-03-01

2011-03-01

Dickey, Thomas L (Department: 2826)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C257S522000

Reexamination Certificate

active

07897506

ABSTRACT:
The present invention discloses a MEMS device with particles blocking function, and a method for making the MEMS device. The MEMS device comprises: a substrate on which is formed a MEMS device region; and a particles blocking layer deposited on the substrate.

REFERENCES:
patent: 2008/0074725 (2008-03-01), Pan
patent: WO 2007022978 (2007-03-01), None
TESS report. on “Black diamond” performed May 31, 2010.
IEEE MEMS 2008, Tucson. AZ, USA, Jan. 13-17, 2008 pp. 798-801.
2001 IEEE Publication pp. 352-357.

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