Micro-electro-mechanical sensor with force feedback loop

Details Micro-electro-mechanical sensor with force feedback loop Micro-electro-mechanical sensor with force feedback loop

2007-10-02

2007-10-02

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504120, C073S503300

Reexamination Certificate

active

11195363

ABSTRACT:
A micro-electro-mechanical sensor includes a microstructure having a mass which is movable with respect to a rest position, according to a predetermined degree of freedom, and a displacement-detecting device for detecting a displacement of the mass according to the predetermined degree of freedom. The displacement-detecting device includes a force feedback loop of a purely analog type, which supplies electrostatic forces tending to restore the mass to the rest position in response to a displacement of the mass according to the predetermined degree of freedom.

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