Micro-column with simple structure

Details Micro-column with simple structure Micro-column with simple structure

2006-05-29

2011-10-25

Maskell, Michael (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C250S3960ML, C250S3960ML

Reexamination Certificate

active

08044351

ABSTRACT:
The present invention relates to an electron column including an electron emission source and lenses, and, more particularly, to an electron column having a structure that can facilitate the alignment and assembly of an electron emission source and lenses. The electron column having an electron emission source and a lens unit according to the present invention is characterized in that the lens unit includes two or more lens layers and performs both a source lens function and a focusing function. Furthermore, the electron column is characterized in that the lens unit includes one or more deflector-type lens layers and additionally performs a deflector function.

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Thompson, et at (“Lens and deflector design for microcolumns” J. Vac. Sci. Technol. B 13(6) Nov./Dec. 1995, pp. 2445-2450).

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