Micro-actuator

Details Micro-actuator Micro-actuator

1993-10-12

1994-09-06

Rosenthal, Arnold

Valves and valve actuation

Heat or buoyancy motor actuated

60528, 60529, 137 80, 137468, 25112906, F16K 3102, F16K 3170

Patent

active

053441176

ABSTRACT:
A micro-actuator includes force elements and compensation elements arranged on a bending element such that a change in the environmental temperature does not cause any flexing of the bending element.

REFERENCES:
patent: 4203128 (1980-05-01), Guckel et al.
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5069419 (1991-12-01), Jerman
patent: 5161774 (1992-11-01), Engelsdorf
D. W. Satchell et al., "A Thermally-Excited Silicon Accelerometer", Sensors & Actuators, vol. 17, pp. 241-245 (1989).
K. E. Petersen, "Silicon as a Mechanical Material", Proceedings of the IEEE, vol. 70, No. 5, pp. 420-457 (May 1982).
T. Ohnstein et al., "Micromachined Silicon Microvalve", IEEE, pp. 95-99 (Apr. 1990).

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