Micro-actuation element provided with torsion bars

Details Micro-actuation element provided with torsion bars Micro-actuation element provided with torsion bars

2008-01-29

2008-01-29

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S198100, C359S199200, C310S309000

Reexamination Certificate

active

07324251

ABSTRACT:
The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d,110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a,113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.

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Supplementary European Search Report, mailed Aug. 9, 2007 and issued in corresponding European Patent Application No. 02807976.2-2217.

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