Optics: measuring and testing – Plural test
Reexamination Certificate
2007-08-07
2007-08-07
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Plural test
C356S369000, C356S630000
Reexamination Certificate
active
11343717
ABSTRACT:
A photoacoustic system with ellipsometer, where the ellipsometer includes a laser light source for generating an incident beam, an element for focusing the incident beam on a sample, a unit for measuring the change in amplitude of the incident beam on reflection and a unit for measuring the phase difference of the incident beam on reflection. The system further includes an element to convert an input narrow spectrum beam generated by the laser light source to a broadband sample measurement beam that is focused onto the sample.
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Mair Robin
Morath Christopher
Wolf Robert Gregory
Geisel Kara
Harrington & Smith PC
Rudolph Technologies, Inc.
Toatley , Jr. Gregory J.
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