Metrology system with spectroscopic ellipsometer and...

Details Metrology system with spectroscopic ellipsometer and... Metrology system with spectroscopic ellipsometer and...

2006-02-28

2006-02-28

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S630000

Reexamination Certificate

active

07006221

ABSTRACT:
An optical system includes both a microspot broadband spectroscopic ellipsometer and a photoacoustic film thickness measurement system that are supplied laser light by the same laser light source. One of the systems makes a measurement, the result of which is used to adjust a parameter of the other system; e.g. the ellipsometer measures thickness and the photoacoustic system uses the thickness result to measure the speed of sound. In one version, the ellipsometer converts the laser beam to a broad-spectrum beam that provides higher intensity.

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