Metrology hardware adaptation with universal library

Details Metrology hardware adaptation with universal library Metrology hardware adaptation with universal library

2005-02-08

2005-02-08

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C356S369000, C356S499000, C702S189000, C438S016000, C382S144000

Reexamination Certificate

active

06853942

ABSTRACT:
To generate sets of coefficients for use in optical metrology of semiconductor structures, at least three optical metrology signals for a set of parameters are obtained. The optical metrology signals are indicative of light diffracted from a semiconductor structure, and a value of at least one parameter of the set of parameters is varied to produce each signal. Functional relationships between the at least three optical metrology signals are obtained, the functional relationships including at least three coefficient values. At least three sets of coefficients from the at least three coefficient values of the functional relationships are determined.

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