Metrics independent and recipe independent fault classes

Details Metrics independent and recipe independent fault classes Metrics independent and recipe independent fault classes

2011-08-30

2011-08-30

Nghiem, Michael P (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C702S179000, C702S183000, C702S189000

Reexamination Certificate

active

08010321

ABSTRACT:
A method and apparatus for diagnosing faults. Process data is analyzed using a first metric to identify a fault. The process data was obtained from a manufacturing machine running a first recipe. A fault signature that matches the fault is identified. The identified fault signature was generated using a second metric and/or a second recipe. At least one fault class that is associated with the fault signature is identified.

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