Methods using active retainer rings for improving edge...

Details Methods using active retainer rings for improving edge... Methods using active retainer rings for improving edge...

2005-07-05

2005-07-05

Nguyen, George (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S398000, C451S397000, C451S296000, C451S300000, C451S303000, C451S306000, C451S299000

Reexamination Certificate

active

06913521

ABSTRACT:
An invention improves edge performance in chemical mechanical polishing processes. A method operation provides a wafer head above a wafer. The wafer head includes a first active retaining ring capable of extension and retraction. Another operation provides a polishing belt below the wafer head, and provides below the polishing belt a platen having a second active retaining ring capable of extension and retraction. Another operation controls positions of the first active retaining ring and the second active retaining ring to provide positional control for the polishing belt, thus adjusting and controlling the removal rate at the edge of the wafer.

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