Methods to improve resolution of cross sectioned features...

Details Methods to improve resolution of cross sectioned features... Methods to improve resolution of cross sectioned features...

2005-10-25

2005-10-25

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S297000, C250S492210, C355S053000, C216S059000

Reexamination Certificate

active

06958476

ABSTRACT:
Methods for creating a cross section of at least one feature located on a substrate are disclosed. The methods include coating the feature with a layer of contrast enhancing material, recoating the feature with a second material that is different from the contrast enhancing material, and milling the feature. The second material has substantially similar milling characteristics as the feature. The methods may further include creating an image of the feature and saving the image of the feature.

REFERENCES:
patent: 4788117 (1988-11-01), Cuthbert et al.
patent: 5028780 (1991-07-01), Kaito et al.
patent: 5093572 (1992-03-01), Hosono
patent: 5739898 (1998-04-01), Ozawa et al.
patent: 5798529 (1998-08-01), Wagner
patent: 6350390 (2002-02-01), Liu et al.
patent: 6580072 (2003-06-01), Chang et al.

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