Methods to clean a surface, a device manufacturing method, a...

Details Methods to clean a surface, a device manufacturing method, a... Methods to clean a surface, a device manufacturing method, a...

2006-04-28

2009-12-08

Pert, Evan (Department: 2893)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C250S492100, C438S115000

Reexamination Certificate

active

07628865

ABSTRACT:
An embodiment of the invention provides a method to clean a surface. The method includes at least partly liberating contaminants from the surface with a contaminant liberating device, and capturing the contaminants that have been at least partly liberated with a contaminant removal device, the contaminant removal device generating at least one optical trap to trap the contaminants that have been at least partly liberated. Embodiments of the invention also provide a device manufacturing method, a method to clean a surface of an optical element, a cleaning assembly and cleaning apparatus, and a lithographic apparatus.

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