Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2005-02-22
2005-02-22
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
C702S081000
Reexamination Certificate
active
06859746
ABSTRACT:
Methods of using adaptive sampling techniques based upon categorization of process variations, and a system for performing same are disclosed. In one illustrative embodiment, the method comprises acquiring metrology data regarding at least one process operation performed on a plurality of substrates in accordance with an initial metrology sampling plan, providing the acquired metrology dam to a controller that identifies process variations in the at least one process operation based upon the acquired metrology data and further identifies a plurality of categories of the process variations. The method further comprises creating, using the controller, a modified metrology sampling plan based upon a relative weighing of the identified categories of the process variations, wherein the modified metrology sampling plan differs from the initial metrology sampling plan in at least one aspect, and acquiring metrology data from at least one subsequently processed wafer in accordance with the modified neology sampling plan.
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Advanced Micro Devices , Inc.
Bui Bryan
Washburn Douglas N
Williams Morgan & Amerson
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