Methods of sampling halosilanes for metal analytes

Details Methods of sampling halosilanes for metal analytes Methods of sampling halosilanes for metal analytes

2007-09-25

2007-09-25

Wallenhorst, Maureen M. (Department: 1743)

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

C422S088000, C436S073000, C436S077000, C436S083000, C436S084000, C436S100000, C436S101000, C436S124000, C436S125000, C436S173000, C436S181000

Reexamination Certificate

active

10622015

ABSTRACT:
Methods for determining the amount of at least one metal analyte present in a liquid or gas sample of a halosilane supply (e.g., a chlorosilane supply) are disclosed herein. A sample of a halosilane supply is contacted and reacted with an aqueous hydrofluoric acid solution to produce a liquid reaction mixture. Liquid from the liquid reaction mixture is evaporated under controlled temperature and pressure conditions to near dryness. The nearly-dry residue is prepared for spectral analysis. The presence of a detectable amount of at least one metal analyte is determined for the sample.

REFERENCES:
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patent: 5723644 (1998-03-01), Tzou
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