4. Agitating
  5. Having specified feed means
  6. Responsive to condition sensor

Air Liquide America L.P.

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Acidic chemistry for post-CMP cleaning

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Acidic chemistry for Post-CMP cleaning using a composition...

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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Alkaline chemistry for post-CMP cleaning

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
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Apparatus and method for mixing gases

Fluid handling – Processes – With control of flow by a condition or characteristic of a...
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Apparatus and methods for launching and receiving a broad...

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
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