Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate
2011-08-02
2011-08-02
Landau, Matthew C (Department: 2813)
Semiconductor device manufacturing: process
Chemical etching
Combined with coating step
C438S695000, C438S702000, C438S734000, C438S759000, C257SE51040, C977S742000, C977S745000, C977S842000, C977S843000
Reexamination Certificate
active
07989349
ABSTRACT:
A method of forming a plurality of nanotubes is disclosed. Particularly, a substrate may be provided and a plurality of recesses may be formed therein. Further, a plurality of nanotubes may be formed generally within each of the plurality of recesses and the plurality of nanotubes may be substantially surrounded with a supporting material. Additionally, at least some of the plurality of nanotubes may be selectively shortened and at least a portion of the at least some of the plurality of nanotubes may be functionalized. Methods for forming semiconductor structures intermediate structures, and semiconductor devices are disclosed. An intermediate structure, intermediate semiconductor structure, and a system including nanotube structures are also disclosed.
REFERENCES:
patent: 5346683 (1994-09-01), Green et al.
patent: 6283812 (2001-09-01), Jin et al.
patent: 6322713 (2001-11-01), Choi et al.
patent: 6340822 (2002-01-01), Brown et al.
patent: 6361861 (2002-03-01), Gao et al.
patent: 6566704 (2003-05-01), Choi et al.
patent: 6597090 (2003-07-01), Mancevski
patent: 6673392 (2004-01-01), Lee et al.
patent: 6720728 (2004-04-01), Den et al.
patent: 2002/0055010 (2002-05-01), Gao et al.
patent: 2002/0167375 (2002-11-01), Hoppe et al.
patent: 2004/0058153 (2004-03-01), Ren et al.
patent: 2004/0071951 (2004-04-01), Jin
patent: 2004/0104660 (2004-06-01), Okamoto et al.
patent: 2004/0137730 (2004-07-01), Kim et al.
patent: 2004/0192152 (2004-09-01), Liu et al.
patent: 2005/0061451 (2005-03-01), Busnaina et al.
patent: 2005/0127351 (2005-06-01), Tolt
patent: 2005/0142385 (2005-06-01), Jin
patent: 2005/0215049 (2005-09-01), Horibe et al.
patent: 2005/0221016 (2005-10-01), Glatkowski et al.
patent: 2006/0169972 (2006-08-01), Furukawa et al.
patent: 2006/0208362 (2006-09-01), Dubin
patent: 2006/0234056 (2006-10-01), Huang et al.
patent: 2007/0224104 (2007-09-01), Kim
patent: WO 03/088361 (2003-10-01), None
patent: WO 2004/033370 (2004-04-01), None
Liu et al., “Effects of Carbon Content in Iron Catalyst Coatings on the Growth of Vertically Aligned Carbon Nanotubes on Smooth Silicon Surfaces by Thermal Chemical Vapor Deposition,” Elsevier, Diamond and Related Materials, vol. 13 (2004), pp. 1274-1280.
Zhu et al., “Growth Orientation of Carbon Nanotubes by Thermal Chemical Vapor Deposition,” Elsevier, Journal of Crystal Growth, vol. 234 (2002), pp. 584-588.
Dong et al., “Length Control of Carbon Nanotubes through Nanorobotic Manipulations,” IEEE, 2003, pp. 144-147.
Grobert, Nicole, “Controlled Synthesis and Nanoscale Characterization of Novel Fullerene-like Materials,” Sussex Nanoscience and Nanotechnology Centre, Jul. 22, 2004, pp. 1-17.
Han et al., “Pyrolytically grown arrays of highly aligned BxCyNznanotubes,” Applied Physics Letters, vol. 78, No. 18, Apr. 30, 2001, pp. 2769-2771.
Han et al., “Synthesis of aligned BxCyNznanotubes by a substitution-reaction route,” Chemical Physics Letters 346 (2001), Oct. 12, 2001, pp. 368-372.
Kyotani et al., “Formation of platinum nanorods and nanoparticles in uniform carbon nanotubes prepared by a template carbonization method,” Institute for Chemical Reaction Science, Tohoku University, Jul. 2004, pp. 1-3.
Lee et al., “Growth and structure of carbon nanotubes produced by thermal chemical vapor deposition,” Carbon 39, 2001, pp. 1891-1896.
Lee et al., “Growth model of bamboo-shaped carbon nanotubes by thermal chemical vapor deposition,” Applied Physics Letters, vol. 77, No. 21, Nov. 20, 2000, pp. 3397-3399.
Li et al., “Electronic properties of multiwalled carbon nanotubes in an embedded vertical array,” Applied Physics Letters, vol. 81, No. 5, Jul. 29, 2002, pp. 910-912.
Miyashita et al., “Selective Growth of Carbon Nanotubes for Nano Electro Mechanical Device,” IEEE, 2001, pp. 301-304.
Qin et al., “Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition,” Applied Physics Letters, vol. 72, No. 26, Jun. 29, 1998, pp. 3437-3439.
Tseng et al., “Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology,” Nano Letters, vol. 0, No. 0, Nov. 2003, pp. A-E.
Gilton Terry L.
Sandhu Gurtej S.
Landau Matthew C
Malek Maliheh
Micro)n Technology, Inc.
TraskBritt
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