Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate
2007-06-05
2007-06-05
McDonald, Rodney G. (Department: 1753)
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C204S192260, C204S192220
Reexamination Certificate
active
10802918
ABSTRACT:
A sputter coated article is provided with improved mechanical durability (e.g., pre-HT scratch resistance) and/or thermal stability by sputtering at least one Ag inclusive layer in an atmosphere including at least O2gas. For instance, in certain example embodiments an Ag inclusive target may be sputtered in an atmosphere including a combination of Ar and O2gas. In certain embodiments, this enables the resulting AgOxinfrared (IR) reflecting layer to better adhere to adjacent contact layer(s).
REFERENCES:
patent: 3843405 (1974-10-01), Bourg
patent: 4413877 (1983-11-01), Suzuki et al.
patent: 4898789 (1990-02-01), Finley
patent: 5201926 (1993-04-01), Szczyrbowski et al.
patent: 5229194 (1993-07-01), Lingle et al.
patent: 5332888 (1994-07-01), Tausch et al.
patent: 5344718 (1994-09-01), Hartig et al.
patent: 5514476 (1996-05-01), Hartig et al.
patent: 5557462 (1996-09-01), Hartig et al.
patent: 5563734 (1996-10-01), Wolfe et al.
patent: 5584902 (1996-12-01), Hartig et al.
patent: 5770321 (1998-06-01), Hartig et al.
patent: 5800933 (1998-09-01), Hartig et al.
patent: 5834103 (1998-11-01), Bond et al.
patent: 5942338 (1999-08-01), Arbab et al.
patent: 6014872 (2000-01-01), Hartig et al.
patent: 6524688 (2003-02-01), Eby et al.
patent: 6576349 (2003-06-01), Lingle et al.
patent: 6602608 (2003-08-01), Stachowiak
patent: 6623846 (2003-09-01), Laird
patent: 6787005 (2004-09-01), Laird et al.
patent: 2001/0041252 (2001-11-01), Laird
patent: 2002/0031674 (2002-03-01), Laird
patent: 2002/0068167 (2002-06-01), Veerasamy
patent: 2003/0049464 (2003-03-01), Glenn et al.
patent: 195 33 053 (1997-04-01), None
patent: WO 99/64362 (1999-12-01), None
patent: WO 01/66483 (2001-09-01), None
patent: WO 02/04375 (2002-01-01), None
US 4,960,645, 10/1990, Lingle et al. (withdrawn)
U.S. Appl. No. 10/243,952, filed Sep. 16, 2002.
XP-002267135, “Method Manufacture Laminate Component Display Device Interposed Oxide Film Silver Group Material Substrate Silver System Film Contain Silver Group Material”, Jun. 17, 2003.
International Search Report dated Jan. 29, 2004.
XP-001073840 “Preparation de Couches Minces DE Ag2O ET Action DE Certains Gaz Sur Celles-CI”, Mitaray et al., Thin Solid Films, 46 (1977) pp. 201-208.
XP-00202187 “The Role of Neutral Oxygen Radicals in the Oxidation of Ag Films”, Schmidt et al., Thin Solid Films 281-282 (1996), pp. 105-107.
“Adhesion of Silver Films to Ion-Bombarded Zirconia”, ERCK, vol. 47, 8, pp. 640-644, no date.
“Ion Beam Mixing of Silver-Magnesium Oxide Multilayers”, Fuchs et al., Thin Solid Films 165 (1988) pp. 347-358.
“Ion Assisted Deposition of Silver” Thin Films, Lee et al., Thin Solid Films 359 (2000) pp. 95-97.
“Swift Heavy Ion-Induced Modification of Metallic” Thin Films and Multilayers, GUPTA, Vacuum 58 (2000) pp. 16-32.
“Roughness Modification of Surfaces Treated by a Pulsed Dielectric Barrier Discharge”, Dumitrascu et al., Apr. 5, 2002, pp. 127-134.
“MeV Heavy Ion-Induced Adhesion of Thin Silver Film to Tantalum”, Qiu et al., 1991, pp. 367-372.
PROCEEDINGS Coating Technology Symposium, Maui, Feb. 3-6, 1987 Airco, Ross et al.
Laird Ronald E.
Lemmer Jean-Marc
Lingle Philip J.
Neuman George
Schillinger Keith H.
Centre Luxembourgeois de Recherches pour le Verre et la Ceramiqu
Guardian Industries Corp.
McDonald Rodney G.
Nixon & Vanderhye P.C.
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