Methods of making and using a chemical-mechanical polishing slur

Details Methods of making and using a chemical-mechanical polishing slur Methods of making and using a chemical-mechanical polishing slur

1997-08-15

1999-08-10

Eley, Timothy V.

Abrading

Abrading process

Utilizing fluent abradant

451 41, 51309, 216 89, 438693, 106 3, B24B 100

Patent

active

059349786

ABSTRACT:
A method of making a chemical-mechanical polishing slurry includes mixing a ferric salt oxidizer with a solution to produce a mixture with a dissolved ferric salt oxidizer, filtering the mixture to remove most preexisting particles therein that exceed a selected particle size, adding a suspension agent to the mixture, and adding abrasive particles to the mixture after filtering the mixture. Advantageously, when polishing occurs, scratching by the preexisting particles is dramatically reduced.

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U.S. Patent Application Serial No. 08/342,326 filed Nov. 18, 1994, entitled Method of Making a Chemical-Mechanical Polishing Slurry and the Polishing Slurry by Woo et al. (copy not enclosed).

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