4. Abrading
  5. Abrading process
  6. Utilizing fluent abradant

Peter J. Beckage

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Apparatus for determining metal CMP endpoint using...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Chemical-mechanical polishing slurry that reduces wafer defects

Abrasive tool making process – material – or composition – With inorganic material – Metal or metal oxide
Utility Patent

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Chemical-mechanical polishing slurry that reduces wafer...

Abrading – Machine – Rotary tool
Reexamination Certificate

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Contact each methodology and integration scheme

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method and apparatus for detecting a process endpoint

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1245897

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