Methods of forming integrated circuits structures including...

Details Methods of forming integrated circuits structures including... Methods of forming integrated circuits structures including...

2006-11-07

2006-11-07

Smoot, Stephen W. (Department: 2813)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Grooved and refilled with deposited dielectric material

C438S426000, C438S435000, C438S478000, C438S739000

Reexamination Certificate

active

07132349

ABSTRACT:
An integrated circuit structure can include an isolation structure that electrically isolates an active region of an integrated circuit substrate from adjacent active regions and an insulation layer that extends from the isolation structure to beneath the active region. An epitaxial silicon layer extends from the active region through the insulation layer to a substrate beneath the insulation layer.

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