Methods of forming electromigration and thermal gradient...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to nonconductive state

Reexamination Certificate

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C438S281000, C438S215000, C438S333000, C438S467000, C438S601000

Reexamination Certificate

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07662674

ABSTRACT:
Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a metallic fuse structure by forming at least one via on a first interconnect structure, lining the at least one via with a barrier layer, and then forming a second interconnect structure on the at least one via.

REFERENCES:
patent: 6111301 (2000-08-01), Stamper
patent: 7298639 (2007-11-01), Hsu et al.
patent: 2004/0262768 (2004-12-01), Cho et al.
patent: 2005/0001241 (2005-01-01), Doyle

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