Etching a substrate: processes – Forming or treating an ornamented article – Treating glass
Reexamination Certificate
2007-07-31
2007-07-31
Ahmed, Shamim (Department: 1765)
Etching a substrate: processes
Forming or treating an ornamented article
Treating glass
C216S052000, C216S083000, C216S088000, C134S003000, C438S905000
Reexamination Certificate
active
10448422
ABSTRACT:
Methods of surface finishing a component useful for a plasma processing apparatus are provided. The component includes at least one plasma-exposed quartz glass surface. The method includes mechanically polishing, chemically etching and cleaning the plasma-exposed surface to achieve a desired surface morphology. Quartz glass sealing surfaces of the component also can be finished by the methods. Plasma-exposed surface and sealing surfaces of the same component can be finished to different surface morphologies from each other.
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Daugherty John E.
Kiehlbauch Mark W.
Ahmed Shamim
Buchanan & Ingersoll & Rooney PC
Lam Research Corporation
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