Methods of fabricating a semiconductor device including a...

Details Methods of fabricating a semiconductor device including a... Methods of fabricating a semiconductor device including a...

2007-06-29

2009-06-02

Kebede, Brook (Department: 2894)

Semiconductor device manufacturing: process

Making passive device

C257SE21364, C257SE21366

Reexamination Certificate

active

07541252

ABSTRACT:
A method of fabricating a semiconductor device includes forming a conductive layer on a semiconductor substrate, forming an insulating layer on the conductive layer, forming a word line and isolation trenches by patterning the insulating layer and the conductive layer, forming an isolation layer that fills the isolation trenches, forming a cell contact hole in the insulating layer such that the cell contact hole is self-aligned with the word line and exposes the word line, and forming a cell diode in the cell contact hole.

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