Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
1998-06-10
2001-02-13
Arroyo, Teresa M. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S311000, C250S492200
Reexamination Certificate
active
06188068
ABSTRACT:
FIELD OF THE INVENTION
This invention relates generally to sample preparation and examination methods and, more particularly, to methods of examining a specimen and of preparing a specimen for transmission electron microscope examination.
BACKGROUND OF THE INVENTION
Use of focused ion beam (FIB)-based techniques to prepare a sample from a specimen for transmission electron microscope (TEM) study or examination is popular and well known. The high lateral resolution of FIB in material removal normally allows removal of sample material at a selected site with sub-micron precision to form ultra-thin transverse sections for study or examination. Standard procedures normally include preparing a 20-50&mgr;m thick sample of specimen material by sawing, grinding and polishing, and thinning the sample to electron transparency using FIB techniques to produce a membrane. Although state of the art, various forms of the foregoing technique prove largely unreliable due to difficulties not only in handling the membrane but also of preparing the membrane prior to handling.
Accordingly, it would be highly desirable to provide a new and improved method of preparing a specimen for TEM study or examination.
It is a purpose of the present invention to provide a new and improved method of preparing a specimen for TEM study or examination that is easy to carry out with existing TEM technology.
It is another purpose of the present invention to provide a new and improved method of preparing a specimen for TEM study or examination that is efficient and inexpensive.
It is still another provision of the present invention to accommodate the long-felt need of providing successful membrane formation and manipulation for TEM study or examination.
It is a further purpose of the present invention to provide a new and improved method of preparing a specimen for TEM study or examination that is very reliable.
It is still a further purpose of the present invention to provide a new and improved method of preparing a specimen for TEM study or examination that eliminates substantially the possibility of damaging a sample during sample preparation operations.
SUMMARY OF THE INVENTION
The above problems and others are at least partially solved and the above purposes and others are realized in exemplary embodiments of improved methods of examining a specimen and of preparing a specimen for examination or study. In a specific embodiment, provided is a method of examining a specimen comprising the steps of providing transmission electron microscope apparatus, mounting a specimen in a vacuum chamber of focused ion beam apparatus, isolating a site of the specimen with the focused ion beam apparatus in the vacuum chamber, and with the site located in the vacuum chamber, examining the site with the transmission electron microscope apparatus. In the present embodiment, the step of isolating the site of the specimen with the focused ion beam apparatus may further include the steps of identifying the site, actuating the focused ion beam apparatus to generate a focused ion beam, and selectively directing the focused ion beam toward the specimen to mill a membrane containing the site and sever the membrane from the specimen.
The present method may further include the step of removing the site from the specimen which may include providing micro-manipulator apparatus housed in the vacuum chamber, the micro-manipulator apparatus having an engagement element, and selectively actuating the micro-manipulator apparatus to move the engagement element to engage, carry and remove the membrane from the specimen.
Examination of the site with the transmission electron microscope apparatus may further include positioning the membrane in line with the transmission electron microscope apparatus, and actuating the transmission electron microscope apparatus. Furthermore, positioning the membrane in line with the transmission electron microscope apparatus may further include the step of selectively actuating the micro-manipulator apparatus to move the engagement element to either hold the membrane in line with the transmission electron microscope apparatus or place the membrane against a support grid located in line with the transmission electron microscope apparatus.
REFERENCES:
patent: 5656811 (1997-08-01), Itoh et al.
patent: 5990478 (1999-11-01), Liu
Novel Scheme For The Preparation of Transmission . . . Overwiijk et al. 1993.
Applications of Focused Ion Beams in Microelectronics . . . Stevie et al. 1995.
Graham Roger J.
Shaapur Frederick F.
Arroyo Teresa M.
Goltry Michael W.
Parsons Robert A.
Parsons & Goltry
Wells Nikita
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