Methods of depositing multilayer thin films

Details Methods of depositing multilayer thin films Methods of depositing multilayer thin films

1999-10-07

2000-10-31

Pianalto, Bernard

Coating processes

Electrical product produced

Metal coating

4271263, 4271265, 4271266, 427127, 427131, 427132, 427250, 42725529, 42725531, 427255395, 4272557, 427258, 427259, 427261, 427265, 427404, 4274192, B05D 512

Patent

active

06139906&

ABSTRACT:
This invention is directed to methods for depositing multilayered thin films onto substrates, for example in making thin film magnetic heads. In accordance with the invention a first film, such as Cr, is deposited onto the substrate at a first angle and a second layer, such as CoCrPt is deposited at a second angle.

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patent: 5664316 (1997-09-01), Chen et al.
patent: 5668685 (1997-09-01), Soeya et al.
patent: 5790351 (1998-08-01), Suzuki
patent: 5889630 (1999-03-01), Karube et al.
patent: 5930589 (1999-07-01), Hilgers et al.

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