Electric heating – Metal heating – By arc
Reexamination Certificate
2011-06-14
2011-06-14
Paschall, Mark H (Department: 3742)
Electric heating
Metal heating
By arc
C219S121430, C219S121590
Reexamination Certificate
active
07960670
ABSTRACT:
A sensor apparatus for measuring a plasma process parameter for processing a workpiece. The sensor apparatus includes a base, an information processor supported on or in the base, and at least one sensor supported on or in the base. The at least one sensor includes at least one sensing element configured for measuring an electrical property of a plasma and at least one transducer coupled to the at least one sensing element. The transducer is configured so as to receive a signal from the sensing element and converting the signal into a second signal for input to the information processor.
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Beers Andrew
Freed Mason L.
MacDonald Paul D.
Mundt Randall S.
Spanos Costas J.
Isenberg Joshua D.
JDI Patent
Kla-Tencor Corporation
Paschall Mark H
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