Methods of and apparatus for making high aspect ratio...

Details Methods of and apparatus for making high aspect ratio... Methods of and apparatus for making high aspect ratio...

2007-02-06

2007-02-06

Wong, Edna (Department: 1753)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Coating selected area

C205S135000, C205S137000

Reexamination Certificate

active

10272254

ABSTRACT:
Various embodiments of the invention provide techniques for forming structures (e.g. HARMS-type structures) via an electrochemical extrusion process. Preferred embodiments perform the extrusion processes via depositions through anodeless conformable contact masks that are initially pressed against substrates that are then progressively pulled away or separated as the depositions thicken. A pattern of deposition may vary over the course of deposition by including more complex relative motion between the mask and the substrate elements. Such complex motion may include rotational components or translational motions having components that are not parallel to an axis of separation. More complex structures may be formed by combining the electrochemical extrusion process with the selective deposition, blanket deposition, planarization, etching, and multi-layer operations of a multi-layer electrochemical fabrication process.

REFERENCES:
patent: 5190637 (1993-03-01), Guckel
patent: 5395508 (1995-03-01), Jolly et al.
patent: 6027630 (2000-02-01), Cohen
patent: 6228242 (2001-05-01), Lavelaine et al.
patent: 2002/0020628 (2002-02-01), Basol
patent: WO 98/45504 (1998-10-01), None
Cohen et al., “EFAB: Rapid, low-cost desktop micromachining of high aspect ratio true 3-D MEMS,” 12th IEEE International Conference on Microelectromechanical Systems, p. 244-251 (Jan. 17-21, 1999).

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