Cleaning and liquid contact with solids – Apparatus – With alarm – signal – indicating – testing – inspecting,...
Reexamination Certificate
2008-10-06
2011-11-08
Stinson, Frankie L (Department: 1711)
Cleaning and liquid contact with solids
Apparatus
With alarm, signal, indicating, testing, inspecting,...
C134S902000
Reexamination Certificate
active
08051863
ABSTRACT:
Apparatus monitors a meniscus process that is performed on wafers. Monitoring data for a current process received by a processor indicates characteristics of a gap between the wafer and a process head. The processor is configured to respond to the data that is in the form of orientation monitor signals and to respond to a current recipe. The processor generates meniscus monitor signals for allowing the meniscus to remain stable in further meniscus processing. The monitoring is of current meniscus processing to determine whether a current gap (i) is other than a desired gap of the current recipe, and (ii) corresponds to a stable meniscus. If so, a calibration recipe is identified as specifying the current gap. This calibration recipe specifies parameters for meniscus processing the wafer surface with the current gap. The meniscus processing of the wafer surface is continued using the parameters specified by the identified calibration recipe.
REFERENCES:
patent: 3953265 (1976-04-01), Hood
patent: 4021278 (1977-05-01), Hood et al.
patent: 4544446 (1985-10-01), Cady
patent: 6090205 (2000-07-01), Sakai et al.
patent: 6488040 (2002-12-01), de Larios et al.
patent: 6550990 (2003-04-01), Sakurai et al.
patent: 6688784 (2004-02-01), Templeton
patent: 6742279 (2004-06-01), Lubomirsky et al.
patent: 6790684 (2004-09-01), Ahn et al.
patent: 6796054 (2004-09-01), Minami et al.
patent: 6875696 (2005-04-01), Sakurai et al.
patent: 6929903 (2005-08-01), Itoh et al.
patent: 7078344 (2006-07-01), Bailey et al.
patent: 7390365 (2008-06-01), Itoh et al.
patent: 2003/0226577 (2003-12-01), Orll et al.
patent: 2005/0092351 (2005-05-01), Saito et al.
patent: 2005/0139318 (2005-06-01), Woods et al.
patent: 2006/0088982 (2006-04-01), Boyd et al.
patent: 2005-093733 (2005-04-01), None
patent: 2006-080403 (2006-03-01), None
Mikhaylich Katrina
Paduraru Cristian
Peng G. Grant
Lam Research Corporation
Martine Penilla Group LLP
Stinson Frankie L
LandOfFree
Methods of and apparatus for correlating gap value to... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods of and apparatus for correlating gap value to..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of and apparatus for correlating gap value to... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4252900