Methods of and apparatus for cleaning and conveying a substrate

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...

Reexamination Certificate

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Details

C134S061000, C134S133000, C406S088000, C406S134000

Reexamination Certificate

active

07997289

ABSTRACT:
Discs roll along an inclined track through a chamber to expose opposite disc sides for cleaning. Energized fluid directed against the opposite sides removes particles from the discs, the fluid and particles exiting the chamber. Stop pins control a time period for cleaning and transporting the discs by selectively blocking or releasing the discs. The discs are stopped at many sections of a transducer, the sections being tailored to provide various cleaning characteristics. Within the chamber, the chamber is configured to minimize particles that originate other than by being adhered to the disc at a time when the disc is introduced into the chamber. Internal chamber configuration also minimizes retention of particles so that particles removed from one disc do not linger in the chamber for possible transfer to a disc that is cleaned in the same chamber at a later time.

REFERENCES:
patent: 3643671 (1972-02-01), Henninges et al.
patent: 6241427 (2001-06-01), Hessburg et al.
patent: 2003/0183246 (2003-10-01), Boyd et al.
patent: 2004/0012363 (2004-01-01), Simondet
patent: 2004/0055625 (2004-03-01), Fishkin et al.
patent: 2006/0285930 (2006-12-01), de Larios et al.

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