4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Yassin Mehmandoust

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Apparatus and method for drying a substrate using...

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Apparatus and method for drying a thin substrate

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Apparatus for drying batches of disks

Drying and gas or vapor contact with solids – Apparatus – Houses – kilns – and containers
Reexamination Certificate

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Apparatus for drying batches of wafers

Drying and gas or vapor contact with solids – Apparatus – With automatic control
Reexamination Certificate

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Disk drying apparatus and method

Drying and gas or vapor contact with solids – Material treated by electromagnetic energy
Reexamination Certificate

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Profile ID: LFUS-PAI-P-100260

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