Methods for uncorrelated evaluation of parameters in parameteriz

Details Methods for uncorrelated evaluation of parameters in parameteriz Methods for uncorrelated evaluation of parameters in parameteriz

1998-09-29

2000-03-07

Font, Frank G.

Optics: measuring and testing

By polarized light examination

Of surface reflection

356365, G01N 2121

Patent

active

060347775

ABSTRACT:
Disclosed is a method for evaluating parameters in parameterized equations for independently calculating retardence entered to orthogonal components in a beam of electromagnetic radiation which is caused to pass through spatially separated input and output windows, by each of said input and output windows. The present invention finds application in ellipsometric investigation of sample systems present in vacuum chambers, wherein a beam of electromagnetic radiation is caused to pass through an input window, interact with a sample system, and exit through an output window, and where it is necessary to separate out the effects of said input and output windows to arrive at sample system characterizing results.

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General Treatment of The Effect of Cell Windows in Ellipsometry, Azzam & Bashara, J. of the Optical Society of America, vol. 61, No. 6 (1971).

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