Methods for transitioning a fluid meniscus to and from...

Details Methods for transitioning a fluid meniscus to and from... Methods for transitioning a fluid meniscus to and from...

2009-02-17

2010-06-08

Perrin, Joseph L (Department: 1792)

Cleaning and liquid contact with solids

Processes

Including use of vacuum, suction, or inert atmosphere

C134S034000

Reexamination Certificate

active

07731802

ABSTRACT:
Methods for processing a substrate with a fluid meniscus are provided. One method includes positioning a transition surface substantially coplanar to a substrate surface. The transition surface is defined to be adjacent to an edge of the substrate. And, moving a fluid meniscus between the transition surface and the substrate surface.

REFERENCES:
patent: 5749469 (1998-05-01), Williams
patent: 6446358 (2002-09-01), Mitsumori et al.
patent: 2004/0083976 (2004-05-01), Meyyappan
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Maria Derksen et al.
patent: 2005/0064681 (2005-03-01), Wood et al.

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