Methods for SEM inspection of fluid containing samples

Details Methods for SEM inspection of fluid containing samples Methods for SEM inspection of fluid containing samples

2007-05-11

2009-08-11

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

Reexamination Certificate

active

07573031

ABSTRACT:
A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning electron microscope, thereby visualizing the sample.

REFERENCES:
patent: 6365898 (2002-04-01), Sudraud et al.
patent: 6452177 (2002-09-01), Feldman et al.
patent: 2007/0125947 (2007-06-01), Sprinzak et al.

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