Methods for sample preparation and observation, charged...

Details Methods for sample preparation and observation, charged... Methods for sample preparation and observation, charged...

2011-03-29

2011-03-29

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S306000, C250S310000, C250S492100, C250S492210

Reexamination Certificate

active

07915581

ABSTRACT:
In an SEM observation in a depth direction of a cross section processed by repeated FIB cross-sectioning and SEM observation to correct a deviation in an observation field of view and a deviation in focus, are corrected, the deviations occurring when a processed cross section moves in the depth direction thereof; information on a height and a tilt of a surface of cross section processing area is calculated before the processing, the above information is used, the deviation in a field of view and the deviation in focus in SEM observation, which correspond to an amount of movement of the cross section at a time of the processing, are predicted, and the SEM is controlled based on the predicted values.

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Japanese Office Action dated Dec. 1, 2009 (Three (3) pages).

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