Methods for plasma diagnostics and the measurement of thin...

Details Methods for plasma diagnostics and the measurement of thin... Methods for plasma diagnostics and the measurement of thin...

2007-12-24

2009-10-06

Lauchman, L. G (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

C356S317000, C356S326000, C356S072000

Reexamination Certificate

active

07599058

ABSTRACT:
Methods for obtaining and analyzing data from a spectral source is provided. The method includes identifying an environment that is capable of generating spectral information, and obtaining the generated spectral information from the environment. The method further includes splitting the generated spectral information into a plurality of spectral data units. The spectral data units are further captured in separate storage entities and separately processed in parallel in order to produce a complete processing and quantification of the environment.

REFERENCES:
patent: 6677604 (2004-01-01), Mitrovic

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