Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2011-02-01
2011-02-01
Tsai, Carol S (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
C702S100000, C702S104000, C073S037000, C073S861520, C073S001250, C137S010000, C137S012000, C137S014000, C137S486000, C137S487500
Reexamination Certificate
active
07881886
ABSTRACT:
A method for determining an actual gas flow rate as gas flows through a gas flow delivery system is provided. The method includes sending the gas through the gas flow delivery system into a gas conduit, wherein a section of the gas conduit is widened to form an orifice. The method also includes pressurizing the gas to create a choked flow condition within the orifice of the gas conduit. The method further includes measuring upstream pressure of the gas via a set of pressure sensors. The method yet also includes calculating the actual flow rate based on the upstream pressure of the orifice of the gas conduit.
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Meinecke Richard J.
Shareef Iqbal A.
Tietz James V.
Wong Vernon
IP Strategy Group, P.C.
Lam Research Corporation
Tsai Carol S
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