Data processing: measuring – calibrating – or testing – Calibration or correction system – Fluid or fluid flow measurement
Reexamination Certificate
2007-11-09
2010-10-26
Wachsman, Hal D (Department: 2857)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Fluid or fluid flow measurement
C073S001340
Reexamination Certificate
active
07822570
ABSTRACT:
A method for determining an actual gas flow rate in a reaction chamber of a plasma processing system is provided. The method includes delivering gas by a gas flow delivery system controlled by a mass flow controller (MFC) to an orifice, which is located upstream from the reaction chamber. The method also includes pressurizing the gas to create a choked flow condition within the orifice. The method further includes measuring a set of upstream pressure values of the gas via a set of pressure sensors. The method yet also includes applying a calibration factor of a set of calibration factors to determine the actual flow rate. The calibration factor is a ratio of an average of the set of upstream pressure values to an average of a set of golden upstream pressure values, which is associated with an indicated flow rate for an MFC.
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Meinecke Richard J.
Shareef Iqbal A.
Tietz James V.
Wong Vernon
IP Strategy Group, P.C.
Lam Research Corporation
O'Malley Mary C
Wachsman Hal D
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