Methods for moving a substrate carrier

Details Methods for moving a substrate carrier Methods for moving a substrate carrier

2011-07-26

2011-07-26

Arbes, C. J (Department: 3729)

Metal working

Plural diverse manufacturing apparatus including means for...

Separate tool stations for selective or successive operation...

C029S564000, C029S592100, C198S346200, C414S217000

Reexamination Certificate

active

07984543

ABSTRACT:
Systems, methods, and apparatus are provided for electronic device manufacturing. The invention includes removing a first substrate carrier and a second substrate carrier from a moving conveyor using an end effector assembly and concurrently transferring the first and second substrate carriers from the moving conveyor to a support location via the end effector assembly. Numerous other aspects are provided.

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