Methods for measuring DMD low frequency spatial uniformity

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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C348S383000, C353S033000, C353S069000, C356S139070, C356S140000, C356S147000, C356S150000, C356S445000, C356S458000, C382S148000, C382S151000, C606S005000

Reexamination Certificate

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06922483

ABSTRACT:
Methods for measuring the low spatial reflectivity uniformity of a DMD spatial light modulator. These methods are unique since they compensate for the non-uniformities introduced by the tilt angle of the DMD mirrors in addition to the normal system non-uniformities introduced by the illumination source and optics. These methods flatten the image and remove all but the low spatial non-uniformities from the DMD mirrors.

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