Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2011-01-11
2011-01-11
Davis, Daborah Chacko (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S320000, C347S225000, C355S018000
Reexamination Certificate
active
07867695
ABSTRACT:
Microstructures are fabricated by impinging a radiation beam, such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.
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Freese Robert P.
Rinehart Thomas A.
Wood Robert L.
Bright View Technologies Corporation
Chacko Davis Daborah
Myers Bigel Sibley & Sajovec P.A.
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